• 专利附录
  • 专利说明
  • 权利要求
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    • 专利摘要:
    The invention relates to an impression (1) for a plastic tooling tool comprising a first and a second half-shell (2a, 2b) forming at least one molding cavity (3) having at least one spacing between two facing surfaces of the molding cavity (3) of between 5 and 500 micrometers and a coating deposited on the surfaces of the molding cavity (3), characterized in that the coating comprises: an amorphous silicon carbide adhesion layer in contact with the surfaces of the cavity (3), and a stack of at least two layers of amorphous silicon carbide and amorphous carbon respectively, the stack being arranged on the adhesion layer, the surface layer of the coating (4) being a carbon layer Amorphous layer of the stack and the thickness of the coating (4) being less than 10 micrometers.The invention also relates to a method of plasturgy using said impression, as well as an electromechanical microsystem, a fluidic micro-object and a lab-on-chip obtained by such a method.
    公开号:CH711636A2
    申请号:CH01363/16
    申请日:2016-10-11
    公开日:2017-04-13
    发明作者:Mele Patrice；Giboz Julien；Fugier Pascal；Baud David；Vuillermoz Philippe
    申请人:Centre Nat Rech Scient；Université De Chambéry；Commissariat à l'énergie atomique et aux énergies alternatives；Ass Pole Europeen De Plasturgie；Vuillermoz Philippe；
    IPC主号:
    专利说明:

    Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The invention relates to a mold cavity for the production of micro-objects or microstructured objects. The invention also relates to a plastics processing method using said cavity.
    [0002] Microinjection processes are now widely used in the field of plastics processing. They can meet a growing demand for polymer-based technical parts, which may have micron-sized dimensions, for applications in many sectors such as pharmaceuticals, electronics, energy , Sport or leisure, watchmaking or the field of microtechnics in general.
    [0003] Reducing the size of the injected objects induces a reduction in the dimensions of the cavities in the tooling. These reductions in size will favor the phenomenon of pressure drops during the flow of the polymer, that is to say pressure losses, the intensity of which increases with the reduction in the thickness of the impression and the length flow. This phenomenon causes difficulties in filling impressions or increases in pressures for the molding of the parts, resulting in geometrical defects on the parts.
    It can be seen that, whatever the conditions of use imposed on the injection press, it is virtually impossible to produce objects whose thickness is less than a few tenths of a millimeter, In the order of 0.3 mm for a flow length of 45 mm or when the shape factor defined by the total flow length / thickness is greater than 150 under conventional thermal molding conditions. In the case of microstructured objects, the minimum thicknesses achievable industrially are of the order of 15 microns, with form factors (length of flow / thickness) achievable on the order of three.
    [0005] This limit restricts the size of objects or microstructures that can be produced in a standardized manner. Moreover, this limit is independent of the nature of the polymer, which exists even for so-called adapted polymers, such as liquid crystal polymers.
    SUMMARY OF THE INVENTION An object of the present invention is to provide a mold cavity for a plasturgy tool and a plastics processing method making it possible to produce objects with characteristic dimensions of less than a few tenths of a millimeter.
    SUMMARY OF THE INVENTION To this end, the subject of the present invention is a mold cavity for a plastic tooling tool comprising a first and a second half-shell forming at least one molding cavity having at least one spacing between two facing surfaces of the molding cavity lying between 5 and 500 micrometers and a coating deposited on the surfaces of the molding cavity, characterized in that the coating comprises: an adhesive layer of amorphous silicon carbide in contact with the surfaces of the molding cavity and a stack of d At least two layers of amorphous silicon carbide and amorphous carbon respectively, the stack being arranged on the adhesion layer, the surface layer of the coating being an amorphous carbon layer of the stack and the thickness of the coating being Less than 10 micrometers.
    [0008] The coating makes it possible to reduce the intensity of the interactions between the molten polymer and the surfaces of the molding cavity. It promotes the sliding of the polymer chains in the molten state during the injection and thus the filling of the molding cavity.
    [0009] The coating also makes it possible to limit the cooling phenomenon of the polymer in the flow situation.
    [0010] Furthermore, the flow velocity is increased and the flow velocity gradient is less environmentally dependent.
    The multi-layer stacking coating thus makes it possible to extend the field of manufacture of plastic micro-parts without additional thermal input at the level of the impression. In a correlated manner, this coating makes it possible to use process conditions (pressures, velocities or temperatures) less intense than those used in the case of an untreated impression, reducing the residual stresses that can cause warpage or Large deformations or visual defects of the micro-objects produced.
    The small thickness of the coating also makes it possible to not modify the roughness of the surfaces of the molding cavity. The control of the surface roughness of the fingerprints proves to be paramount when the micro-objects or microstructured objects produced must satisfy functions related to their surface properties.
    According to an exemplary embodiment, the impression has a geometric criterion C greater than or equal to 200, the geometric criterion being defined by the equation: ## EQU1 ## where: d is the smallest spacing of a microstructure of the cavity - Ic is the length which can be traveled by the molten polymer in the molding cavity along the microstructure, - La is the length traveled by the molten polymer in the impression before entering the microstructure.
    The coating thus makes it possible to obtain micro-objects or microstructured objects having profiles of important geometric criterion C without increasing the thickness of the coating which remains less than 10 micrometers. The coated impression thus makes it possible to increase the complexity of the micro-pieces or micro-structured pieces produced, but also to facilitate the realization of objects with greater shape factors or larger geometric criteria C or to increase the reproducibility .
    According to one or more characteristics of the imprint taken alone or in combination: the thickness of the coating is less than 5 micrometers, such as on the order of 1.8 micrometers, the thickness of the surface layer Of the stack is less than 500 nanometers, such as on the order of 100 nanometers, the thickness of the adhesion layer is between 20 and 50 nanometers, for a stack having a number of layers greater than two , The number of layers is even and the layers are arranged alternately, the number of layers in the stack is between 2 and 128, such as around 32.
    The subject of the invention is also a plastics processing method, characterized in that a polymer is injected into a mold cavity for molding tools as described above.
    According to an exemplary embodiment of the plastics process in which a polymer is injected into a cavity, the injection pressure of the molten polymer is less than 2000 bar, such as less than 1500 bar, for a geometric criterion of l The order of 200.
    The reduction in operating pressures also makes it possible: to avoid fatigue damage to the tools and impressions, and in particular to microstructured inserts of the half-shells forming the molding cavity and giving the final shape to the microstructured objects Molded, - to increase the service life and periodicity of tools and impressions, - to use conventional injection molding machines, - to reduce the environmental impact of the process by reducing the energy consumption related to the transformation process.
    The subject of the invention is also an electromechanical microsystem or a fluidic micro-object comprising at least one microfluidic component such as a micropump, a microvalve, a micro-mixer, a microfilter, a capillary or a laboratory on a chip obtained by a Plastics process as described above.
    SUMMARY DESCRIPTION OF THE DRAWINGS
    BRIEF DESCRIPTION OF THE DRAWINGS Other advantages and characteristics will become apparent on reading the description of the invention, as well as on the appended figures, which show a non-limiting embodiment of the invention and in which: FIG. 1 shows a diagrammatic and sectional view of a first example of a cavity mounted in a plasturgy tooling, FIG. 2 shows an injected part obtained from the feed duct and the molding cavity of the recess of FIG. 1, Fig. 3a is a schematic cross-sectional view of another example of a molding for a molding tool, FIG. 3b shows a schematic sectional view of another example of an impression, FIG. 4a is a diagram showing a polymeric flow front filling a molding cavity for the production of a microstructured object having a relief microstructure with respect to the main body, FIG. 4b is a diagram showing a polymeric flow front filling a molding cavity for the production of a microstructured object having a hollow microstructure with respect to the main body, FIG. 5a shows another example of an injected part obtained from a feed conduit and molding cavities, this figure being an adaptation of a figure from the article "Han, S.-Y. & amp; Kim, W.-B. Microinjection molding of miniaturized polymeric ortho-planar springs Microsystem Technologies, Springer Berlin Heidelberg, pp. 1-9, 2015, Fig. 5b shows a front view of a microstructured object obtained by molding in one of the molding cavities which made it possible to produce the injected part illustrated in FIG. 5a, this figure being an adaptation of a figure from the article "Han, S.-Y. & amp; Kim, W.-B. Microinjection molding of miniaturized polymeric orthoplanar springs Microsystem Technologies, Springer Heidelberg, pp. 1-9, 2015, Fig. 6a shows another example of an injected part obtained from a supply conduit and a molding cavity, this figure being an adaptation of a figure from the article "Development of 3D simulations of microinjection molding process; Comparison between experiments and simulations, Patrice Mêlé, Sylvain Carrier and Julien Giboz, 27th Annual Meeting of the Polymer Processing Society, 10-14 May 2011, Marrakech (Morocco) FIG. 6b shows a front view of a micro-object obtained by molding in the molding cavity that made it possible to produce the injected part of FIG. 6a, this figure being an adaptation of a figure from the article "Development of 3D simulations of microinjection molding process; Comparison between experiments and simulations, Patrice Mêlé, Sylvain Carrier and Julien Giboz, 27th Annual Meeting of the Polymer Processing Society, 10-14 May 2011, Marrakech (Morocco) ", Fig. 7 shows a partial, enlarged and sectional view of a coating deposited on the surface of a molding cavity and the flow of a molten polymer, FIG. 8a is an image of the profile of a microobjector made with uncoated prior art tooling, in a view normal to the direction of flow, FIG. 8b is a diagram of a micro-object produced with the same injection conditions as for the micro-object of FIG. 8a with an impression according to the invention, FIG. 9a shows a graph of the pressures (in bar) of the molten polymer, measured at a given position of a molding cavity without coating, as a function of time (in seconds) for the successive manufacture of several identical micro-objects, FIG. 9b shows a graph of the pressures (in bar) of the molten polymer, measured at a given position of a molding cavity identical to that of FIG. 9a with a coating according to the invention deposited on the surfaces of the molding cavity as a function of time (in seconds), and FIG. 10 represents the surface roughness values ​​Ra, (in nm) measured for three positions,
    In these figures, the identical elements bear the same reference numerals. The following are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference relates to the same embodiment or that the features apply only to a single embodiment. Simple features of different embodiments may also be combined to provide other embodiments.
    DETAILED DESCRIPTION
    [0022] FIG. 1 shows a mold cavity 1 for use in the manufacture of micro-objects or microstructures on articles made of plastic material, such as a thermoplastic polymer, which may or may not be loaded, such as PS (polystyrene), PC Poly (Polycarbonate), COC (Olefin Cyclic Copolymer), PP (PolyPropylene), PE (PolyEthylene), POM (PolyOxyMethylene), PMP (PolyMethylPentene), or PAI Polytetramethylene (PEI), polyesters (PET, PBT), polyamides (PA6, PA11, PA12, PA4-6, PA6-6, PA6-9, PA6-10, PA6-12 PPA), fluoropolymers , Poly-arylEtherCetones (PEK, PEEK, PEKEK), polyarylsulfones (PSU, PESU, PPSU), or LCP (Liquid Crystal Polymers), copolymers or mixtures thereof.
    The micro-objects or microstructured objects are objects obtained by injection having micrometric dimensions for eg applications in the pharmaceutical, electronics, energy, sports or leisure, watch-making or domain Microtechniques in general.
    The impression 1 comprises a first and a second metal half-shell 2a, 2b, such as steel, which come into contact along a "joint plane" P to form at least one molding cavity 3.
    The impression 1 also comprises a feed conduit 7 formed in one or other of the half-shells 2a, 2b or by joining the two half-shells 2a, 2b. The supply conduit 7 has an inlet 7a accessible from the outside of the cavity 1 and at least one outlet 7b opening into a molding cavity 3, as can be seen on the injected part of FIG. 2 obtained by molding in the molding cavity 3 and the supply duct 7. The feed duct 7 can have several outlets 7b for supplying several molding cavities 3 of the cavity 1 (see, for example, the injected part of FIG. 5a where the supply duct 7 of the cavity 1 used for molding supplies two molding cavities 3).
    Around the inlet 7a of the supply conduit 7, the cavity 1 is shaped so as to be fed with molten polymer by a feed nozzle (FIG. 1).
    The supply duct 7 may be heated ("hot duct") or not ("cold duct").
    The molding cavity 3 is intended to receive the molten polymer 8 which will flow and then be shaped under pressure (depending on the high viscosity of the polymers and on the filling flow rate). Once the polymer has been cooled, a micro-object or a microstructured object is produced.
    The depths of the two half-shells 2a, 2b with respect to the joint plane P may be identical (FIG 3a) or not (FIG 3b) and have a respective pattern.
    The molding cavity 3 has at least one microstructure having a gap d1 between two facing surfaces of the molding cavity 3 of between 5 and 500 micrometers, this distance being normal to the direction of flow FD of the molten polymer 8 injected into The molding cavity 3.
    A microstructure having a microstructure 12 having at least a distance d1 of less than 500 micrometers is distinguished from a microstructured object comprising, on the one hand, a main body 9 having dimensions greater than 500 micrometers (which disturbs little The flow of the molten polymer 8) and, on the other hand, at least one microstructure 10, in relief with respect to this main body 9 (FIG 4a) or in recess (FIG 4b) To 200 micrometers.
    In the examples of FIGS. 1,2,3a and 3b for which the molding cavity 3 has a general parallelepiped shape, of constant thickness, the smallest distance d1 is the minimum thickness of the molding cavity 3.
    For an impression 1 intended for the manufacture of a microstructured object (FIGS. 4a, 4b, 5b): the smallest spacing d2; D3 is the smallest dimension of the microstructure 10 of the molding cavity 3, in relief with respect to the main body 9 (FIG 4a) or hollow with respect to the main body 9 (FIG 4b), separating two facing surfaces Of the molding cavity 3, normal to the direction of flow FD of the molten polymer injected into the molding cavity 3.
    In the examples of FIGS. 4a and 4b for which the microstructures 10 of the molding cavities 3 have a general parallelepiped shape (several parallel plates), the smallest spacing d2 is the thickness of the microstructure 10.
    [0035] The smallest spans d1; d2; d3; D4 of the microstructures 10; 12 of the molding cavity 3 are formed voluntarily and for the purpose of allowing the microstructured object or micro-object molded in the molding cavity 3 to exert a specific function.
    More precisely, for a fingerprint 1, a geometric criterion C is defined by the equation E1:
    (E1) where: - d, is the smallest distance d1; d2; d3; D 4 of a microstructure of the molding cavity, Ic is the length that can be traveled by the molten polymer in the molding cavity 3 along the microstructure, La is the length traveled by the molten polymer 8 in the front cavity 1 To penetrate into the microstructure.
    Thus, in the example illustrated in FIG. 2, lc is the length of the injected piece corresponding to the length of the molding cavity 3 and La is the length of the injected part corresponding to the length traveled by the molten polymer in the feed conduit 7, ie Between the inlet 7a of the cavity 1 and the inlet 7b of the molding cavity 3.
    For a length lc of the order of 45 millimeters and a length La of the order of 36 millimeters, the geometric criterion C is of the order of 74 for a smaller spacing d1 of the order of 0, 52 millimeters. The geometric criterion C is of the order of 274 for a smaller gap d1 of the order of 0.27 mm.
    In the example illustrated in FIG. 4a, lc is the length of the microstructure 10 of the molding cavity 3 and La is the length of the feed duct 7 to which is added the length traveled by the molten polymer in the molding cavity 3. Main body 9 to reach the entrance of a microstructure 10.
    For a length lc of the order of 2 millimeters and a length La of the order of 16 millimeters, the geometric criterion C is of the order of 178 for a smaller spacing d2 of the order of 0, 1 millimeter. The geometric criterion C is of the order of 711 for a smaller distance d2 of the order of 0.05 millimeters.
    [0041] FIGS. 5a and 5b illustrate another example of a microstructured object with four diametrically opposed and evenly distributed microstructures 10 connecting a ring-shaped outer main body 9a to a disc-shaped inner main body 9b. The molten polymer began to distribute through a point on the periphery of the outer main body 9a.
    The microstructures 10 have a smaller distance d3 constant over a length Iforming a "C" loop having a spring function.
    For a length lc of the order of 3.66 millimeters and a length La of the order of 40.5 millimeters, the geometric criterion C of the microstructured object is of the order of 336 for a smaller one Gap d3 of the order of 0.1 millimeter. The geometric criterion C is of the order of 150 for a smaller gap d3 of the order of 0.15 millimeters.
    [0044] FIGS. 6a and 6b illustrate an example of a micro-object with its power supply. The micro-object is in the form of a toothed wheel with eight microstructures 12 in the form of teeth, diametrically opposed and regularly distributed around a cylinder 11, at the center and at the top of which the molten polymer began to distribute.
    The microstructures 12 have a smaller distance d4 forming a narrowing over a short length lc. For a length lc of the order of 2.2 millimeters and a length La of the order of 65 millimeters, the geometric criterion C of the microobject is of the order of 53 for a smaller spacing d4 of the order Of 0.2 millimeters. The geometric criterion C is of the order of 213 for a smaller distance d4 of the order of 0.1 millimeters.
    In order to obtain microstructured micro-objects or objects having profiles of important geometric criterion C, the impression 1 also comprises a coating 4 deposited on the surfaces of the molding cavity 3.
    The coating 4 deposited on the surfaces of the molding cavity 3 is shown in FIG. 7. It comprises an adhesive layer 5 made of amorphous silicon carbide in contact with the surfaces of the half-shells 2a, 2b forming the molding cavity 3 and a stack 6 of at least two layers 6a, 6b, respectively of carbide of Amorphous silicon and amorphous carbon.
    The amorphous silicon carbide layers 5, 6a and amorphous carbon 6b may or may not be hydrogenated.
    The surface layer of the coating 4 is an amorphous carbon layer 6b of the stack 6 on which the molten polymer 8 flows in contact.
    The stack 6 is thus interposed between the adhesion layer 5 and the molten polymer 8 at the time of injection.
    [0051] The amorphous carbon is also called DLC ("Diamond Like Carbon").
    The number of layers 6a, 6b remains even for a stack 6 having a number of layers 6a, 6b greater than two. In addition, the layers 6a, 6b are alternately arranged so that after the adhesion layer 5 and up to the surface layer 6b, the layers of amorphous silicon carbide 6a and amorphous carbon 6b are alternated. There is thus shown a stack 6 of four alternating layers 6a, 6b in FIG. 7.
    The thickness e of the coating 4 is less than 10 micrometers, such as less than 5 micrometers, such as on the order of 1.8 micrometers.
    More precisely, the number of layers 6a, 6b in the stack 6 is between 2 and 128, such as 32. The thickness of the layer 6b is, for example, less than 500 nanometers, such as between 10 and 150 nanometers. The thickness of the adhesion layer 5 is, for example, less than 100 nanometers, such as between 20 and 50 nanometers. The thickness of each of the layers 6a of the amorphous silicon carbide of the stack 6 is between 5 and 50 nanometers.
    The deposition of the coating 4 is carried out by depositing successive layers by a plasma-enhanced chemical vapor deposition (PECVD) process at low temperature, close to 400 ° C., Which has the advantage of not generating deformation of the half-shells 2a, 2b of the impression 1.
    The coating 4 makes it possible to reduce the intensity of the interactions between the molten polymer 8 and the surfaces of the molding cavity 3. As can be seen in FIGS. 8a and 8b where a micro-object is made with a coated impression 1 (FIG 8b) or with a tool of the prior art (FIG 8a), it can be seen that while the micro-objects are made with conditions , The micro-object produced with the tool of the prior art could not be produced in its entirety.
    The coating 4 thus makes it possible to modify the physicochemical properties of the molding cavity 3, facilitating the flow of the molten polymer 8. The coating 4 makes it possible to promote the sliding of the polymer chains in the molten state during the molding And thus filling the molding cavity 3.
    The coating 4 also makes it possible to limit the cooling phenomenon of the polymer in the flow situation.
    Furthermore, the reduction in flow velocity is minimized and the gradient of flow velocities is less dependent on the environment. The average flow velocities of the polymer in a molding cavity 3 having a smaller gap d1 between two facing surfaces of the molding cavity 3 of 0.27 millimeters or a geometric criterion C of the order of 274 having a coating 4 Are of the order of 1300 mm / s, that is to say of the order of two times greater than a flow rate without coating and this, with iso-injection conditions and independently of the thickness E of the coating 4. The coating 4 thus makes it possible to obtain micro-objects or microstructured objects having profiles of important geometric criterion C without increasing the thickness e of the coating 4 which remains less than 10 micrometers.
    FIGS. 9a and 9b show pressure curves of the molten polymer 8 when filling a molding cavity 3 with defined injection conditions in the case of a molding cavity 3 without coating (FIG. 9a) and with a coating 4 Of a thickness e of the order of 1.8 micrometers and a number of layers 6a, 6b of the stack 6 equal to 32 (FIG 9b) for the manufacture of about 20 micro-objects.
    For the same conditions of the plasturgy process, it can be seen that the pressure values ​​measured in the molding cavity 3 without coating (FIG 9a) are lower than those found with a molding cavity 3 provided with the coating 4 (FIGS. 9b ), Which is characteristic of the greater pressure drops in the uncoated molding cavity 3.
    The charge losses, defined here by the equation (E2), are at least 10% lower when the coating 4 is used. (E2) It is also observed that the maximum pressure values ​​between the various embodiments in the uncoated molding cavity (FIGS. 9a) are more strongly distributed than those measured in the molded cavity 3 (FIG. 9b). Thus, without coating, the maximum values ​​recorded at a given position are between 370 and 640 bars (ie 270 bars), whereas with the coating 4, the pressure range is between 790 and 840 bars (that is to say 50 bar ), Which shows a greater stability of the conditions for producing the micro-objects in the presence of the coating 4.
    More generally, the capacity of the plastics processing process to produce micro-objects according to defined tolerances will be greater, due to lesser and better controlled head losses in the presence of the coating 4.
    The coating 4 with multilayer stacking 6 thus makes it possible to extend the field of manufacture of plastic micro-parts to spacings d1 between two facing surfaces of the molding cavity 3 of less than 0.27 mm, or lengths greater than 45 mm Or higher form factors (ratio of flow length to thickness greater than 166), without additional heat input to the cavity. More generally, the coating 4 makes it possible to produce microstructured objects or micro-objects for impressions 1 for which the geometric criterion C is greater than 200.
    Correlatedly, this coating 4 makes it possible to use process conditions (pressures, velocities or temperatures) less intense than those used in the case of an untreated impression, reducing the residual stresses which may be caused by the non- Origin of warpage or significant deformation or visual defects of the micro-objects produced.
    From the point of view of the plastics processing method, the reduction in the processing pressures necessary for producing the micro-structured micro-parts or parts also makes it possible to: To reduce the fatigue damage of the moldings 1, and in particular of microstructured inserts of the half-shells 2 a, 2 b forming the molding cavity 3 and giving the final shape to the molded microstructured objects (FIGS. 4a, 4b) To increase the service life of the tools and impressions 1, to increase the periodicity of maintenance of the tools and impressions 1, to use conventional injection molding machines, at the maximum pressures which are sometimes insufficient to produce this type of parts, To reduce the environmental impact of the process by reducing the energy consumption related to the transformation process.
    The thin thickness e of the coating 4 also makes it possible not to modify the roughness of the surfaces of the molding cavity 3. The roughness of the surfaces of the molding cavity 3 can thus be preserved, as shown in FIG. 10, over a range of roughness ranging from 0.06 μm <Ra <4 μm. The roughness values ​​estimated using the arithmetic roughness parameter Ra, mean deviation from the mean plane measured on a profile, do not change following application of the treatment. The control of the surface roughness of the impressions is essential when the micro-objects or microstructured objects produced must satisfy functions related to their surface properties or their geometries.
    For microfluidic or optical applications, the desired roughnesses Ra on the micro-objects are often less than 100 nm, such as on the order of 20 nm. In some cases, surfaces with higher roughnesses, with 0.1 μm <Ra <0.3 μm, will be preferred, if, for example, the ejection phase of the molded micro-parts or microstructures is to be facilitated, and limiting The rate of non-compliant parts. Even more rough surfaces could be desired, such as when these products are to be integrated into a system by an assembly step. The roughnesses can then differ from several decades and reach 20 micrometers.
    The plasturgy process thus makes it possible to increase the complexity of the micro-pieces or micro-structured pieces produced, but also to facilitate the production of objects with greater shape factors or larger geometric criteria C or of Enhance reproducibility.
    The microobject obtained by the implementation of the plastics processing method is, for example, an electromechanical microsystem. The MicroElectroMechanical System (MEMS) is a microsystem comprising at least one mechanical element, with a view to achieving a sensor and / or actuator function, with micrometric dimensions; The function of the system being partly assured by the shape of the structure.
    权利要求:
    Claims (12)
    [1] The micro-object or microstructured object obtained may also be a component of a microfluidic element used in the pharmaceutical, biomedical, agroalimentary, chemical or cosmetic sectors, such as a micropump, microvalve, micromixer or microfilter element. It comprises, for example, negative microstructures (recessed relative to the main body) or positive (raised in relation to the main body) made by microinjection, formed by the flow of the polymer into a molding cavity. Thus, this microstructured object or micro-structured object comprises, for example, a plurality of wells for storing a fluid such as a microwell plate. According to another example, the microobject obtained is a laboratory-on-chip ("lab-on-a-chip"). The laboratory on chip is an integrated device gathering on one miniaturized substrate one or more laboratory functions, in particular for biological analysis, such as the study of molecules or macromolecules. Thus, the fluidic micro-object comprises, for example, micropillars (micropillars) or a matrix ("microarray"). claims
    1. An impression for a plastics tooling tool comprising a first and a second half-shell forming at least one molding cavity having at least one spacing between two surfaces, (3) of between 5 and 500 micrometers and a coating (4) deposited on the surfaces of the molding cavity (3), characterized in that the coating (4) comprises: an adhesion layer (5) of amorphous silicon carbide in contact with the surfaces of the molding cavity (3), and a stack (6) of at least two amorphous carbon and amorphous carbon layers (6a, 6b) The stack (6) being arranged on the adhesion layer (5),The surface layer of the coating being an amorphous carbon layer of the stack and the thickness of the coating being less than 10 micrometers.
    [2] 2. A molding according to claim 1, characterized in that it has a geometrical criterion (C) greater than or equal to 200, the geometrical criterion (C) being defined by the equation (E1): or:

    Is the smallest spacing (d1; d2; d3; d4) of a microstructure (10; 12) of the molding cavity (3); Ic is the length that can be traveled by the molten polymer in the molding cavity (3) along the microstructure (10; 12), La is the length traveled by the molten polymer (8) in the cavity (1) before entering the microstructure (10; 12).
    [3] 3. An impression (1) for a plastics tool according to claim 1, wherein the thickness (e) of the coating (4) is less than 5 micrometers.
    [4] 4. A molding according to claim 1, characterized in that the thickness of the surface layer (6b) of the stack (6) is less than 500 nanometers.
    [5] 5. An impression (1) for a plastics tool according to claim 1, wherein the thickness of the adhesion layer is between 20 and 50 nanometers.
    [6] 6. A molding according to claim 1, characterized in that the number of layers (6a, 6b) for a stack (6) having a number of layers (6a, 6b) greater than two ) Is even and the layers (6a, 6b) are arranged alternately.
    [7] 7. A molding according to claim 1, wherein the number of layers (6a, 6b) in the stack (6) is between 2 and 128, Order of 32.
    [8] 8. Plastics processing method, characterized in that a polymer is injected into a molding tool cavity (1) according to any one of the preceding claims.
    [9] 9. Plastics processing method according to claim 1, in which a polymer is injected into a cavity (1) according to claim 2, characterized in that the injection pressure of the molten polymer (8) is less than 2000 bar, 'Less than 1500 bar, for a geometric criterion (C) of the order of 200.
    [10] 10. An electromechanical microsystem characterized in that it is obtained by a plastics processing method according to one of claims 8 or 9.
    [11] 11. A fluid microscope comprising at least one microfluidic component, such as a micropump, a microvalve, a micro-mixer, a microfilter or a capillary, characterized in that it is obtained by a plastics process according to one of the claims 8 or 9.
    [12] 12. Laboratory on a chip, characterized in that it is obtained by a plastics processing method according to one of claims 8 or 9.
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    同族专利:
    公开号 | 公开日
    FR3042146A1|2017-04-14|
    FR3042146B1|2018-04-06|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    WO2006129608A1|2005-06-01|2006-12-07|Honda Motor Co., Ltd.|Die reinforcing method and die repairing method|
    US8541926B2|2011-06-27|2013-09-24|The United States Of America As Represented By The Secretary Of The Army|Nano/micro electro-mechanical relay|
    TW201443269A|2013-05-02|2014-11-16|Hon Hai Prec Ind Co Ltd|Method for forming complex film of diamond like carbon and carborundum|
    法律状态:
    2019-02-28| NV| New agent|Representative=s name: ACTOSPHERE SARL, CH |
    2019-02-28| PFA| Name/firm changed|Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR Free format text: FORMER OWNER: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR |
    2021-05-31| AZW| Rejection (application)|
    优先权:
    申请号 | 申请日 | 专利标题
    FR1559729A|FR3042146B1|2015-10-13|2015-10-13|IMPRESSION FOR TOOLING OF PLASTURGY AND PLASTIC PROCESS|
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